@InProceedings{OliveiraUeMoHoReAb:2007:NoPrPl,
author = "Oliveira, Rog{\'e}rio de Moraes and Ueda, M{\'a}rio and Moreno,
Beatriz and Hoshida, Lilian and Reuther, Helfried and Abramof,
Eduardo",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)}",
title = "A novel process for plasma immersion implantation and deposition
with ions from vaporization of solid targets",
booktitle = "Proceedings...",
year = "2007",
organization = "International Workshop Plasma-Bases Ion Implantation and
Deposition, 9. (PBII).",
conference-location = "Leipzig, Germany",
conference-year = "02-06 Sept.",
language = "en",
urlaccessdate = "08 maio 2024"
}